��B͸��ИI(y��)�đ�(y��ng)��

��r(sh��)�g��2008-01-25 11:23 ��(l��i)Դ�� : ��x��2341

��Ԫ��Ҫ��Ʒ�|(zh��)�ļ�ˮ,��ˮ,��Ӽ�(j��)��ˮ��Ŀǰ��ϼ��Ʒ�|(zh��)Ҫ��ߵ�ˮ.��ӹ��I(y��)�õĳ��ˮ��V��a(ch��n)Ӌ(j��)��C(j��)Ӳ�P(p��n),��·оƬ,��

��(d��o)�w��@��,��Һ��@ʾ��,��·��õļ�ˮ,��(du��)ˮ�ļ��Ҫ��^��,��(du��)��ˮ��ʵ�Ҫ��_(d��)��ϣ�MΩ.cm��(j��)��

        �S��ӹ��I(y��)�İl(f��)չ��(du��)�߼�ˮ��Խ��(l��i)Խ�ߵ�Ҫ��,��,��16KλDRAM��Sˮ��TOC��ЙC(j��)̼��500ppb��x�Ӟ�1ppb,��≥0.2μm��w��100��(g��)/��,��16MλDRAM�r(sh��)��tҪ��TOC��5ppb,��x�ӣ�0.2ppb,��ˮ��≥0.1μm�w��(sh��)��0.6��(g��)/��

        ��f(shu��)��Ӽ�(j��)��ˮ�Ƃ�ϵ�y(t��ng)�ЅR��ˮ�(d��ng)ǰˮ̎��g(sh��)��M(j��n)�Ĺ�ˇ��O(sh��)��,�糬�V,��΢�V,��B͸��ĤÓ��,��ȥ�x��(EDI)��,��з��B͸�b��(g��)��ˮ,��ˮ�Ƃ�ϵ�y(t��ng)��һ�P(gu��n)�I��O(sh��)��.��Ч��ȥ��ԭˮ��97%��ϵ��ܽ��ԟo(w��)�C(j��)��|(zh��)��99%��ϵ��(du��)��|(zh��)��300��ЙC(j��)��,��99%��ϵİ��(x��)��ڃ�(n��i)�ĸ��N΢��95%��ϵĶ��Ȼ��.

        ��B͸��ˇ�ڼ�ˮ,��ˮ�Ƃ�ϵ�y(t��ng)��еđ�(y��ng)��,��ˮa(ch��n)ˮƷ�|(zh��),��a(ch��n)�ɱ�,��ҷ�ֹ�h(hu��n)��Ⱦ,��M(j��n)��ӹ��I(y��)��M(j��n)��,ͬ�r(sh��)Ҳ��M(j��n)�˼�ˮ��ˮ��켼�g(sh��)�İl(f��)չ.

        ��҇�(gu��)RO��(y��ng)��ӹ��I(y��)ˮ̎��Ĉ�(b��o)��,��׷�ݵ�1981��,��RO��g(sh��)�ͼ��ɹ��(y��ng)��ڴ�Ҏ(gu��)ģ��·��ˮ�Ƃ䡣�˺�,��F(xi��n)RO��ȡ��ˮ��ˇ��о��͸��Ҏ(gu��)ģ��ˮ�Ƃ�Ĉ�(b��o)��,��2004��4�£��(gu��)�Һ��ֺ��ˮ̎��g(sh��)�_(k��i)�l(f��)��Ğ阷(l��)��w��޹�˾�O(sh��)Ӌ(j��)�ͽ��ɵ�13Om3/hRO��ɫ�@��܏Uˮ��(xi��ng)Ŀ��RO��ˮ�Ƃ似�g(sh��)��ӹ��I(y��)�I(l��ng)��(y��ng)�õ��չ,��ԓ�(xi��ng)Ŀ��҇�(gu��)��һ��(g��)�^��Ҏ(gu��)ģ�M(j��n)�в�ɫ�@��a(ch��n)��I(y��)�Uˮ��(xi��ng)Ŀ,��

        ͨ�^(gu��)��(gu��)��“��”,��“��”�Ƽ��P(gu��n)�(xi��ng)Ŀ�Č�(sh��)ʩ�҇�(gu��)��ˮ�Ƃ�ϵ�y(t��ng)��O(sh��)Ӌ(j��)�ͳ��˺ܴ��,��׹��̵�ϵ�y(t��ng)��ˇ�O(sh��)Ӌ(j��)��O(sh��)��ͳ��,��b�{(di��o)ԇ,��g(sh��)��Ӗ(x��n)��P(gu��n)�I��g(sh��),��̑�(y��ng)�ü��g(sh��)��_(d��)��ˇ�(gu��)�Hˮƽ��

����D(zhu��n)�d��ǳ��ڂ��f��Ϣ֮Ŀ��,��Ё�(l��i)Դ��(bi��o)ע�e(cu��)�`��ַ��ĺϷ��(qu��n)��,��Ո(q��ng)��߳֙�(qu��n)��C��c��W(w��ng)(li��n)ϵ��҂��r(sh��)��,��h��,��x�x��